Rapid and inexpensive method for fabrication of multi-material multi-layer microfluidic devices
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AAF25A
Characterization of polymer-based piezoelectric micromachined ultrasound transducers for short-range gesture recognition applications
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB1F41
Piezoresistive strain sensor based on monolayer molybdenum disulfide continuous film deposited by chemical vapor deposition
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB0726
Fabrication of micro-scale radiation shielding structures using tungsten nanoink through electrohydrodynamic inkjet printing
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB3B26
Sensing strategies in wearable bio-mechanical systems for medicine and sport: a review
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB2F24
Effect of circuit phase delay on bias stability of MEMS gyroscope under force rebalance detection and self-compensation method
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB27E8
Hydrodynamic channeling as a controlled flow reversal mechanism for bidirectional AC electroosmotic pumping using glassy carbon microelectrode arrays
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB1D9F
Development of an impedance-based interdigitated biochemical sensor using a multiuser silicon process
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB078F
Electrical surface charge patterns induced by droplets sliding over polymer and photoresist surfaces
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB3182
On-ratio PDMS bonding for multilayer microfluidic device fabrication
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB341E
Experimental study on micromilling of thin walls
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AAEECB
A novel capacitive micro-accelerometer made of steel using micro wire electrical discharge machining method
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB4E41
Acoustic power transfer for biomedical implants using piezoelectric receivers: effects of misalignment and misorientation
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB257F
Highly sensitive and flexible strain sensor based on Au thin film
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AAEBE4
MEMS thermal gas flow sensor with self-test function
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/ab4aef
Multimode excitations for complex multifunctional logic device
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/ab4dfc
High-yield indium-based wafer bonding for large-area multi-pixel optoelectronic probes for neuroscientific research
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB2A53
Metallized SU-8 thin film patterns on stretchable PDMS
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB307F
In situ thermo-mechanical bending behavior of VO2 microcantilevers across the phase transition
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AAEAB5
Making thick photoresist SU-8 flat on small substrates
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AAED1C
Deposited poly-Si as on-demand linewidth compensator for on-chip Fabry–Perot interferometer and vertical linear variable optical filter bandpass and passband manipulation
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB035C
A bionic micro-electromechanical system piezo-resistive vector hydrophone that suppresses vibration noise
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB3DD1
Ultrasonic welding for the rapid integration of fluidic connectors into microfluidic chips
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB10D2
Fabrication of Fabry–Perot-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AAF6CB
Droplet-jet mode near-field electrospinning for controlled helix patterns with sub-10 µm coiling diameter
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB025E
Vibrational modes in MEMS resonators
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/ab4bad
A novel impedance sensing approach for precise electromechanical characterization of cells
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB38FC
Numerical analysis and experiment of high-efficiency long-term PDMS open-surface mixing chip
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB145F
Intrinsic stress-induced bending as a platform technology for controlled self-assembly of high-Q on-chip RF inductors
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB16BD
Microfluidic device for generating regionalized concentration gradients under a stable and uniform fluid microenvironment
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AAF029
Fabrication of ultrahigh-aspect-ratio and periodic silicon nanopillar arrays using dislocation lithography and deep reactive-ion etching
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB3749
Theoretical and experimental studies of electrostatic focusing for electrohydrodynamic jet printing
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB0C65
Capacitive micromachined ultrasonic transducers for transmitting and receiving ultrasound in air
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/ab4e00
Uniformity improvement of deep silicon cavities fabricated by plasma etching with 12 inch wafer level
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB3602
Flow-induced synthesis of polystyrene-block-poly(ethylene glycol) vesicles on the interface of a laminated microflow
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB0237
Investigation of parallel-connected MEMS electrostatic energy harvesters for enhancing output power over a wide frequency range
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB284D
Comparison of Al and Cu masks used for patterning boron-doped diamonds in oxygen plasma
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/ab4d6f
A CMUT-based gas density sensor with high sensitivity
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB3BFA
Step and scanning lithography for patterning seamless microstructures on the inner surface of a hollow roller
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB38F1
Micromechanical vibration absorber for frequency stability improvement of DETF oscillator
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB0364
Experimental study of current density in copper filling process within deep Through-Silicon Vias with high aspect ratio
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/ab3f3e
A 37-actuator polyimide deformable mirror with electrostatic actuation for adaptive optics microscopy
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB2370
Array of 3D permanent micromagnet for immunomagnetic separation
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB259F
Dynamics of a Pair of Ellipsoidal Microparticles under a Uniform Magnetic Field
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB3432
Investigation on gate dielectric material using different optimization techniques in carbon nanotube field effect transistors (CNFETs)
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB2A61
A factorial design approach to fracture pressure tests of microfluidic BF33 and D263T glass chips with side-port capillary connections
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AAFE5B
A simple edge-following scanning algorithm for proton beam writing and other direct-write lithographies
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AAFA03
Fabrication of high aspect ratio structures in silicon independent of crystal orientation using metal assisted etching
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB1982
Millipixel image correlation for sub nm measurement of MEMS motion
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/ab3ede
High temperature-assisted electrohydrodynamic jet printing of sintered type nano silver ink on a heated substrate
来源期刊:Journal of Micromechanics and MicroengineeringDOI:10.1088/1361-6439/AB0739